自動研磨機

自動研磨拋光機

LP061精密研磨拋光機為單工作站台式機

Ø  適用於小規模生產的研磨和拋光
Ø  能夠完成6英寸及以下尺寸樣品的處理
Ø  加工出來的樣品具有高平整度、高表面光潔度等特點
Ø  適合在半導體、光電、光學等應用領域
Ø  LP061研磨/拋光的所有功能，包括盤轉速、擺臂設定、滴料速度等均可控
Ø  通過觸摸屏進行參數等控制和設定。

> LP061 precision grinding and polishing machine is a single-workstation desktop machine,
> which is suitable for grinding and polishing in small-scale production.
> It can complete the processing of samples with a size of 6 inches and below.
> The processed samples have the characteristics of high flatness and high surface finish.
> In semiconductor, optoelectronics, optics and other application fields.

All functions of LP061 grinding/polishing, including disc speed, swing arm setting, dripping speed, etc., can be controlled, and parameters can be controlled and set through the touch screen.

性能指標

 機械研磨後誤差精度：

Ø  50 mm晶圓的總厚度偏差（TTV）在±1μm以內
Ø  75 mm晶圓的總厚度偏差（TTV）在±2μm以內
Ø  100 mm晶圓的總厚度偏差（TTV）在±3μm以內

機械化學拋光後誤差精度：
Ø  50 mm晶圓的總厚度偏差（TTV）在±1μm以內
Ø  75 mm晶圓的總厚度偏差（TTV）在±2μm以內
Ø  100 mm晶圓的總厚度偏差（TTV）在±3μm以內