自动研磨机

自动研磨抛光机

LP061精密研磨抛光机为单工作站台式机

Ø  适用於小规模生产的研磨和抛光
Ø  能够完成6英寸及以下尺寸样品的处理
Ø  加工出来的样品具有高平整度、高表面光洁度等特点
Ø  适合在半导体、光电、光学等应用领域
Ø  LP061研磨/抛光的所有功能，包括盘转速、摆臂设定、滴料速度等均可控
Ø  通过触摸屏进行参数等控制和设定。

> LP061 precision grinding and polishing machine is a single-workstation desktop machine,
> which is suitable for grinding and polishing in small-scale production.
> It can complete the processing of samples with a size of 6 inches and below.
> The processed samples have the characteristics of high flatness and high surface finish.
> In semiconductor, optoelectronics, optics and other application fields.

All functions of LP061 grinding/polishing, including disc speed, swing arm setting, dripping speed, etc., can be controlled, and parameters can be controlled and set through the touch screen.

性能指标

 机械研磨后误差精度：

Ø  50 mm晶圆的总厚度偏差（TTV）在±1μm以内
Ø  75 mm晶圆的总厚度偏差（TTV）在±2μm以内
Ø  100 mm晶圆的总厚度偏差（TTV）在±3μm以内

机械化学抛光后误差精度：
Ø  50 mm晶圆的总厚度偏差（TTV）在±1μm以内
Ø  75 mm晶圆的总厚度偏差（TTV）在±2μm以内
Ø  100 mm晶圆的总厚度偏差（TTV）在±3μm以内